MUNICH, Germany — Semiconductor equipment manufacturer Aixtron (Aachen, Germany) has sold a machine for carbon nanotube (CNT) growth to the university of Tuebingen, Germany. The university plans to use the machine for CNT research.

The equipment combines both thermal CVD and plasma enhanced CVD in a single platform. The university will use it for the development of CNT-based field effect transistors, vacuum electronic devices and sensor technology.

Tuebingen university professor Dieter Kern said he is impressed by the ease-of use and the rapid processing times of the system. "The automated recipe feature will enable us to produce single-wall and multi-wall CNT material in a reproducible and controllable way," he said.

According to Aixtron, the Tuebingen installation follows similar steps after a series of installations at prestigious US-based research institutes including Harvard University and Yale University.