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German startup joins e-beam initiative

September 15, 2009 | | 220000332
Genisys GmbH (Munich, Germany), a provider of e-beam layout software has joined the eBeam Initiative, a forum dedicated to the education and promotion of design for e-beam (DFEB) manufacturing.
LONDON — Genisys GmbH (Munich, Germany), a provider of e-beam layout software has joined the eBeam Initiative, a forum dedicated to the education and promotion of design for e-beam (DFEB) manufacturing.

The Genisys tool called Beamer serves as a data-preparation library that integrates proximity effect correction, writing strategy and resist effects

"The company is currently moving its advanced e-beam process modeling and correction technologies from R&D into production applications. At the 22-nm node and beyond, there is a serious need for these features in photomask and maskless lithography," said Ulrich Hofmann, founder and general manager of Genisys, in a statement issued by the eBeam Initiative. The membership of the eBeam Initiative includes: Advantest, Alchip Technologies, Altos Design Automation, Cadence Design Systems, CEA/Leti, D2S, Dai Nippon Printing, e-Shuttle, Fastrack Design, Fujitsu Microelectronics, Genisys GmbH, Magma Design Automation, STMicroelectronics, Tela Innovations, Toppan Printing, Virage Logic and Vistec Electron Beam Lithography Group.

Related links and articles:

www.genisys-gmbh.de

www.ebeam.org

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